On-Die Diffractive Alignment Structures for Packaging of Microlens Arrays with 2-D Optoelectronic Device Arrays.
Abstract
- Publication:
-
IEEE Photonics Technology Letters
- Pub Date:
- July 1996
- DOI:
- 10.1109/68.502270
- Bibcode:
- 1996IPTL....8..918B