A Simple Analytic ICP Model and Comparison to Experiment
Abstract
An analytic model is developed for a cylindrically symmetric inductively coupled plasma system in order to find the electron temperature and density distribution. Boltzmann's equation is solved by a computer code using a 2-term spherical harmonic expansion. Analytic results are compared to experimental measurements made with a Langmuir probe. The apparatus is a magnetron system (magnetron system donated by MRC) with an RF coil or other ionization source inserted between the target and substrate. Far from the target, the resulting plasma is dominated by this ionization source, so the plasma at the magnetron target is not accounted for in the analytic model. In the model, electric and magnetic fields from the RF coil are found as a function of position and the power deposition profile is calculated. Insights gained from this model have been used to guide research efforts in ionizing the sputter flux in the magnetron.
- Publication:
-
APS Annual Gaseous Electronics Meeting Abstracts
- Pub Date:
- October 1996
- Bibcode:
- 1996APS..GEC.MPA09J