Multi-channel electronically scanned cryogenic pressure sensor
Abstract
A miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multielement array. These dies are bonded at specific sites on a glass, prepatterned substrate. Thermal data is multiplexed and recorded on each individual pressure measuring diaphragm. The device functions in a cryogenic environment without the need of heaters to keep the sensor at constant temperatures.
- Publication:
-
National Aeronautics and Space Administration Report
- Pub Date:
- April 1995
- Bibcode:
- 1995nasa.reptR....C
- Keywords:
-
- Cryogenics;
- Electronic Equipment;
- Measuring Instruments;
- Miniaturization;
- Pressure Sensors;
- Dies;
- Patent Applications;
- Pressure Measurement;
- Silicon;
- Instrumentation and Photography