Tunneling acoustic microscopy
Abstract
The objectives of this research are to develop ultrasonic sensors and actuators using silicon micromachining, and to develop theoretical models of the behavior of these devices. A number of applications are envisaged in the fields of in-situ sensors, ranging, hydrophones, sensors for scanning atomic tips in imaging and lithography, and non destructive evaluation.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- July 1995
- Bibcode:
- 1995STIN...9614188K
- Keywords:
-
- Acoustic Microscopes;
- Actuators;
- Electroacoustic Transducers;
- Electron Tunneling;
- Hydrophones;
- Ultrasonics;
- Underwater Acoustics;
- Imaging Techniques;
- Lithography;
- Mathematical Models;
- Micromachining;
- Nondestructive Tests;
- Rangefinding;
- Signal Detectors;
- Silicon;
- Thin Films;
- Electronics and Electrical Engineering