Study on magnetic focusing and deflection electron microbeam probe systems
Abstract
A compact low voltage electron microbeam probe system with magnetic focusing and deflection is proposed which has a fine field emission tip aligned by the STM method. An apertured magnetic screen is used to make the magnetic field vanish at the tip surface. The compact combined magneto-electrostatic lens and deflection system has very small aberrations and extreme fine spot sizes of nanometer order can be produced over scanning fields of 7.5 × 7.5-10 × 10 μm 2 for a beam half-angle on the image side of 40-50 mrad without dynamic correction of the deflection aberration.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- August 1995
- DOI:
- 10.1016/0168-9002(95)00057-7
- Bibcode:
- 1995NIMPA.363..326T