Aberrations of an electrostatic three-cylinder system used to simultaneously focus and deflect charged particles
Abstract
The properties have been studied of an electrostatic three-cylinder lens-deflector in which the middle cylinder is split longitudinally into four parts, allowing the system to be used to simultaneously focus and deflect a beam of charged particles. The aberrations are found to be of first order in the deflection.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- 1995
- DOI:
- 10.1016/0168-9002(95)00424-6
- Bibcode:
- 1995NIMPA.363...54D