磁気軸受型複合分子ポンプ用保護軸受の大気突入試験; 磁気軸受型複合分子ポンプ用保護軸受の大気突入試験; Sudden Venting Test of an Emergency Bearing for the Magnet Bearing Type Compound Moleuclar Pump.
Abstract
- Publication:
-
Journal of the Vacuum Society of Japan
- Pub Date:
- 1995
- DOI:
- 10.3131/jvsj.38.458
- Bibcode:
- 1995JVSJ...38..458H