Optical properties of hydrogenated amorphous silicon films doped with fluorinated gases

Doped amorphous silicon films were prepared by plasma-enhanced chemical vapour deposition of silane and hydrogen mixtures, using phosphorus pentafluoride (PF ₅) and boron trifluoride (BF ₃) as dopant precursors. The films were studied by UV-vis spectroscopy and their photo and dark conductivity were measured, the latter as a function of temperature. The optical gap of the n-type samples, doped with PF ₅, diminished as the concentration of this gas in the plasma was increased. However, the optical gap of p-type samples, doped with BF ₃, did not show any appreciable optical gap decrease as the concentration of BF ₃ was varied from 0.04% to 4.7%. The dark conductivity of the p-type films at these extremes of the doping range were 7.6 × 10 ^-10 and 3.5 × 10 ^-1 Ω ^-1 cm ^-1, respectively.