Channel-optical-waveguide fabrication based on electron-beam irradiation of polyimides
Abstract
A new-channel-waveguide-fabrication process for use with polyimide is described. The new technique uses an electron-beam-induced effect to alter the refractive index of the polyimides directly. Channel waveguides with an 8- mu m-wide, 8- mu m-deep core have been fabricated on a polyimide film by the use of electron-beam irradiation. Only one kind of polyimide (6FDA/TFDB) was used in this waveguide. The difference in refractive index between the core and the cladding was approximately 0.30% for both TE-and TM-polarized incident light when the dose was 1500 mu C/cm2, which was sufficient to produce waveguides. The optical properties of the waveguide are also demonstrated.
- Publication:
-
Applied Optics
- Pub Date:
- February 1995
- DOI:
- 10.1364/AO.34.001047
- Bibcode:
- 1995ApOpt..34.1047M
- Keywords:
-
- WAVEGUIDES: CHANNEL;
- OPTICAL FABRICATION;
- BEAMS: ELECTRON;
- POLYMERS