Micro-sensor thin-film anemometer
Abstract
A device for measuring turbulence in high-speed flows is provided which includes a micro-sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14 deg half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique.
- Publication:
-
National Aeronautics and Space Administration Report
- Pub Date:
- November 1994
- Bibcode:
- 1994nasa.reptY....S
- Keywords:
-
- Aluminum Oxides;
- Anemometers;
- High Speed;
- Thin Films;
- Turbulence;
- Patent Applications;
- Single Crystals;
- Fluid Mechanics and Heat Transfer