New five-standard calibration procedures for network analyzers and wafer probes
Abstract
New calibration procedures using five two-port standards are developed for network analyzer, test fixture and wafer prober environments. The theory and calibration equations for a 16-term error model are shown. Based on numerical simulations, it is pointed out that five two-port calibration measurements are needed to exactly calibrate the 16 parameter error model. Possible combinations of calibration standards are studied. The nonsingular and the singular combinations are listed in Tables. The limitations of the Super-TSD algorithm are defined for the first time.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- March 1994
- Bibcode:
- 1994STIN...9515611S
- Keywords:
-
- Calibrating;
- Integrated Circuits;
- Microwave Circuits;
- Network Analysis;
- Standards;
- Algorithms;
- Error Analysis;
- Least Squares Method;
- Matrices (Mathematics);
- Wafers;
- Electronics and Electrical Engineering