Optical performance of Mo/Si multilayer coated lamellar phase grating in soft x-ray domain
Abstract
The fabrication and characterization of soft X-ray multilayer lamellar phase gratings are given simply in this paper. The measurement of optical performance of soft X-ray multilayer phase grating at Beijing Synchrotron Radiation Facility is described in detail. The measurement results are analyzed and also compared with the theory predication.
- Publication:
-
Second International Conference on Thin Film Physics and Applications
- Pub Date:
- October 1994
- DOI:
- 10.1117/12.190754
- Bibcode:
- 1994SPIE.2364..214Y