Elimination of cross sensitivity in a three-dimensional magnetic sensor
Abstract
In three-dimensional (3-D) integrated magnetic sensor design, cross-axis sensitivities among the various components of the magnetic field have been a problem. In this brief it is demonstrated that complete elimination of the cross-sensitivity is possible if a 3-D magnetic sensor is implemented in BiCMOS technology. A compact device structure is designed to detect the three components of the magnetic field vector by placing a split-collector magnetotransistor and a split-drain MOSFET adjacent to each other. Measured sensitivities of the sensor are presented.
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- April 1994
- DOI:
- 10.1109/16.278523
- Bibcode:
- 1994ITED...41..622M
- Keywords:
-
- Cmos;
- Magnetic Measurement;
- Magnetometers;
- Sensitivity;
- Field Effect Transistors;
- Hall Effect;
- Magnetic Fields;
- Instrumentation and Photography