Field emitter arrays for RF vacuum microelectronics
Abstract
SRI International has completed the sixth quarter of a program to develop field-emitter arrays for vacuum microelectronics. We have met the first-phase program goals of 5 mA total emission, with a current density of 5 A/sq cm for at least 2 hours and demonstrated modulation of the emission current at a frequency of 1 GHz. A series of controlled tests was initiated with photoresist/developer/stripper combinations to identify the source of a contamination problem in the low-capacitance cathode fabrication technology. A sequence of procedures was specified for cathode emission tests using previously developed test chambers. High-frequency testing with a triode setup at 1-GHz modulation rates was begun.
- Publication:
-
Southwest Research Inst. Report
- Pub Date:
- August 1993
- Bibcode:
- 1993sri..reptQR...S
- Keywords:
-
- Contamination;
- Current Density;
- Emitters;
- Microelectronics;
- Radio Frequencies;
- Frequencies;
- Modulation;
- Vacuum;
- Electronics and Electrical Engineering