Phase conjugated lasers applied to commercial x ray lithography
Abstract
Over the last 20 years lasers have been a useful tool in the generation of x-ray radiation. Recent technology advances have allowed solid state lasers to be designed as a drive source for proximity print x-ray lithography systems as well as in the longer term for soft x-ray projection lithography systems. In addition the ability to build multi-hundred joule per pulse, several nanosecond pulselength lasers with repetition rate capability and table top size now allow us to design table top x-ray sources and x-ray lasers. Within our laboratory several high power solid state lasers are being built for direct application to these systems. It was found that the best performance of these high power lasers is obtained when non-linear phase conjugate mirrors are included. These mirrors function in two important respects; they provide a means to obtain very high beam brightness without the generation of hot spots which damage optical components and in addition because of their threshold activation characteristic they function in the role of multistage gain isolators. The design and performance of two systems which are being hardened for commercialization and a third system which is in the design phase and will be used as a pump source for an x-ray laser are described in detail.
- Publication:
-
Presented at the 2nd International School and Topical Meeting on Applications of Nonlinear Optics
- Pub Date:
- June 1993
- Bibcode:
- 1993ano..meet...16H
- Keywords:
-
- High Power Lasers;
- Mirrors;
- Phase Conjugation;
- Printed Circuits;
- Solid State Lasers;
- X Ray Lasers;
- Lithography;
- Neodymium Lasers;
- X Ray Sources;
- Lasers and Masers