The determination of the spatial extension of atomic steps on the single crystal surface by glancing ion scattering
Abstract
By use of computer simulation the features of the correlated glancing scattering of medium energy ions by the imperfect surface of a single crystal have been investigated. It has been shown that, from the correlation of the experimental and calculated energy distributions of the scattered particles, one may determine a spatial extension of the isolated atomic steps on the single crystal surface damaged by the ion bombardment.
- Publication:
-
Vacuum
- Pub Date:
- January 1993
- DOI:
- 10.1016/0042-207X(93)90245-6
- Bibcode:
- 1993Vacuu..44..889U