Automatic power-stabilizing technology for XeCl excimer lasers
Abstract
This paper describes an automatic power-stabilizing technology using a gas processing system for rare gas halide excimer lasers, especially XeCl depletion and gas purifiers to remove impurities generated by laser operation in the laser tube. The gas processing system has been applied to a 200W-class UV-preionized XeCl excimer laser and an output power fluctuation of less than +/- 1.9% at 208W was realized for a continuous 8-hour operation. A 400W-class UV-preionized XeCl excimer is now being manufactured and it will include the gas processing system.
- Publication:
-
NASA STI/Recon Technical Report A
- Pub Date:
- 1993
- Bibcode:
- 1993STIA...9587724O
- Keywords:
-
- Excimer Lasers;
- Laser Outputs;
- Laser Stability;
- Ultraviolet Lasers;
- Xenon Chloride Lasers;
- Decontamination;
- Diatomic Gases;
- Gas Injection;
- Hydrogen Chlorides;
- Purification;
- Lasers and Masers