High-resolution capacitive pressure gauges
Abstract
Design, construction, methods of measurement, and uses of high-resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10-3 to over 107 Pa, with a resolution of as high as 1×10-8 are described. Many uses that have been made of these gauges are mentioned with emphasis on 3He melting pressure thermometry.
- Publication:
-
Review of Scientific Instruments
- Pub Date:
- March 1993
- DOI:
- 10.1063/1.1144184
- Bibcode:
- 1993RScI...64..601A
- Keywords:
-
- Calibrating;
- Capacitance;
- Capacitors;
- Pressure Gages;
- Pressure Sensors;
- Accuracy;
- Electric Bridges;
- Resolution;
- Temperature Effects;
- Temperature Measurement;
- Vapor Pressure;
- Instrumentation and Photography