Needs for super-smooth surfaces
Abstract
Understanding the needs for super smooth optics yields insights for optical fabricators tasked to produce them. These needs include substrates for metrology and a host of X-ray applications. In addition to some grazing angle of incidence optics, normal incidence optics with multilayer stacks have been recently produced. These optics have very demanding finish requirements. Lacquer and flow polishing have produced some interesting surfaces.
- Publication:
-
Presented at the International Symposium on Optical Fabric Testing and Surface Evaluation
- Pub Date:
- May 1992
- Bibcode:
- 1992ofts.symp.....S
- Keywords:
-
- Angles (Geometry);
- Grazing Incidence;
- Metrology;
- Mirrors;
- Reflectance;
- Substrates;
- Surface Roughness;
- X Rays;
- Lacquers;
- Microscopy;
- Molybdenum;
- Polishing;
- Silicon;
- Optics