Applications of energy loss contrast STIM
Abstract
Scanning Transmission Ion Microscopy (STIM) with energy loss contrast is a quantitative imaging technique. A focussed MeV ion microbeam is scanned over the sample, and measured energy losses of residual ions at each beam location are used to provide the contrast in the image. The technique is highly efficient, as almost every ion carries useful information from which quantitative data can be obtained. The high efficiency of data collection at present necessitates the use of small beam currents. Therefore, small apertures can be used, and fine spatial resolution can be achieved. High efficiency also makes it possible to collect large data sets for high definition imaging with a small radiation dose. Owing to the simple relationship between energy loss and areal density, STIM with energy loss contrast can provide a quantitative image that can be used to obtain areal density information on the sample. These areal density maps can be used not only to provide a high resolution image of the sample but also to normalize Particle Induced X-ray Emission (PIXE) data. The small radiation dose required to form these areal density maps also allows one to use STIM with energy loss contrast to quantitatively monitor ion beam induced specimen changes caused by higher doses and dose rates used in other microanalytical techniques. STIM with energy loss contrast also provides the possibility of stereo imaging and ion microtomography. STIM has also been used in conjunction with channeling to explore transmission channeling in thin crystals. This paper will discuss these applications of STIM with energy loss contrast and look at further developments from them.
- Publication:
-
Presented at the 3rd International Conference on Nuclear Microprobe Technology and Applications
- Pub Date:
- May 1992
- Bibcode:
- 1992nmta.conf....8B
- Keywords:
-
- Data Acquisition;
- Energy Dissipation;
- Image Processing;
- Imaging Techniques;
- Ion Microscopes;
- Radiation Dosage;
- Tomography;
- Images;
- Information;
- Ion Beams;
- Spatial Resolution;
- Instrumentation and Photography