High density plasma production in a multicusp plasma generator with RF antenna
Abstract
A high density plasma was produced by radio-frequency in a multicusp plasma generator. The generator is a cylindrical chamber of 200 mm in inner diameter and 270 mm in length with 1-3 turn copper tube antenna. By injecting a 2 MHz, 20 kW RF into the multicusp plasma generator, hydrogen plasma of an ion saturation current density of 120 mA/sq cm and a hydrogen plasma of a density of 6.0(10)(exp 11)/cu cm was produced at a pressure of 0.6 Pa in the generator. The ion saturation current density was uniform over the central area of 100 mm in diameter. Coating the antenna with an insulator, we proved that the efficiency of the plasma production was improved.
- Publication:
-
Unknown
- Pub Date:
- October 1992
- Bibcode:
- 1992hdpp.rept.....S
- Keywords:
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- Cylindrical Chambers;
- Hydrogen Plasma;
- Plasma Density;
- Plasma Generators;
- Plasma Heating;
- Plasmas (Physics);
- Radio Frequencies;
- Copper;
- Current Density;
- Insulators;
- Ion Currents;
- Plasma Physics