Surface modification using a cascade arc plasma source
Abstract
Investigations on the plasma physical aspects of a seeded argon cascade arc plasma, expanding into vacuum, used as a particle source for surface modifications are considered. The cascade arc particle source, the expansion with monomer seeding, and the surface modification and its interrelations are emphasized. The objective was to understand the plasma physical processes that govern the radical and ion fluxes impinging on the substrate, in relation with the external settings, and finally the parameters of the modified substrate.
- Publication:
-
Ph.D. Thesis
- Pub Date:
- 1992
- Bibcode:
- 1992PhDT........14B
- Keywords:
-
- Arc Spraying;
- Argon Plasma;
- Cascades;
- Crystallinity;
- Deposition;
- Plasma Etching;
- Plasma Physics;
- Surface Layers;
- Amorphous Materials;
- Carbon;
- Magnetohydrodynamic Flow;
- Mathematical Models;
- Radiative Heat Transfer;
- Silicon;
- Two Dimensional Models;
- Plasma Physics