Optical functions of silicon determined by two-channel polarization modulation ellipsometry
Abstract
The optical properties of ( 100 ), ( 111 ), and ( 110 ) silicon have been determined from 234 to 840 nm ( 5.30 to 1.48 eV ) at room temperature using two-channel polarization modulation ellipsometry. The results are tabulated in terms of the refractive index n and extinction coefficient k, including the propagated errors, and are compared with previously published spectroscopic ellipsometry data.
- Publication:
-
Optical Materials
- Pub Date:
- January 1992
- DOI:
- 10.1016/0925-3467(92)90015-F
- Bibcode:
- 1992OptMa...1...41J