Experimental and theoretical performances of an etched lamellar multilayer grating in the 1 keV region
Abstract
The performance of a lamellar multilayer amplitude grating with a 0.24 μm pitch produced using holography and reactive ion etching is assessed in the 1 keV region with synchrotron radiation. The position and efficiency of the various orders of grating diffraction are compared to values calculated within the framework of kinematical or dynamical models. The unique properties of these optical devices are discussed.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- February 1992
- DOI:
- 10.1016/0168-9002(92)90200-N
- Bibcode:
- 1992NIMPA.312..521B