On-line gas-phase optical diagnostics in plasma CVD deposition of carbon films Fantoni, R. ; Giorgi, M. ; Moliterni, A. G. G. ; Berden, W. C. M. ; Lazic, V. ; Martini, O. ; Polla Mattiot, F. Abstract Publication: Journal of Materials Research Pub Date: May 1992 DOI: 10.1557/JMR.1992.1204 Bibcode: 1992JMatR...7.1204F