A self-aligned short process for insulated-gate bipolar transistors Chow, T. P. ; Baliga, B. J. ; Gray, P. V. ; Adler, M. S. ; Chang, M. F. ; Pifer, G. C. ; Yilmaz, H. Abstract Publication: IEEE Transactions on Electron Devices Pub Date: June 1992 DOI: 10.1109/16.137310 Bibcode: 1992ITED...39.1317C