A high-speed and highly uniform submicrometer-gate BPLDD GaAs MESFET for GaAs LSIs Noda, M. ; Hosogi, K. ; Oku, T. ; Nishitani, K. ; Otsubo, M. Abstract Publication: IEEE Transactions on Electron Devices Pub Date: April 1992 DOI: 10.1109/16.127462 Bibcode: 1992ITED...39..757N