Synthesis of diamond films by using hot filament CVD with acetone hydrogen mixture
Abstract
This paper describes the synthesis of diamond films by the hot filament CVD with acetone-hydrogen gas mixtures. The substrates are Si and Mo. Deposited films are identified as diamond by Raman spectroscopy, X-ray diffraction and SEM. The compositions and morphologies of the diamond films are studied by SEM and Raman spectroscopy. The influences of experimental conditions on the diamond films growth is discussed.
- Publication:
-
Applications of Diamond Films and Related Materials
- Pub Date:
- 1991
- Bibcode:
- 1991adfr.proc..537Z
- Keywords:
-
- Crystal Growth;
- Diamond Films;
- Gas Mixtures;
- Synthesis (Chemistry);
- Vapor Deposition;
- Acetone;
- Filaments;
- Hydrogen;
- Molybdenum;
- Raman Spectra;
- Silicon;
- Substrates;
- X Ray Diffraction;
- Solid-State Physics