A structural study of the thermally oxidized Si(001) wafer by X-ray CTR scattering Iida, Y. ; Shimura, T. ; Harada, J. ; Samata, S. ; Matsushita, Y. Abstract Publication: Surface Science Letters Pub Date: 1991 DOI: 10.1016/0167-2584(91)90689-O Bibcode: 1991SurSL.258A.599I