Anisotropic etching of GaAs using a hot Cl2 molecular beam
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 1991
- DOI:
- 10.1116/1.585647
- Bibcode:
- 1991JVSTB...9.2798O