Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer
Abstract
- Publication:
-
Journal of the Optical Society of America A
- Pub Date:
- June 1991
- DOI:
- 10.1364/JOSAA.8.000919
- Bibcode:
- 1991JOSAA...8..919N
- Keywords:
-
- ELLIPSOMETRY