A continuum model for low-pressure radio-frequency discharges

A computational model for low-pressure (<0.3-0.5 Torr) radio-frequency glow discharges is presented. The governing equations are the first three moments of the Boltzmann transport equations. In order to describe the weakly collisional sheaths, the nonlinear inertia terms in the momentum equations are retained. The model is demonstrated for a 13.56-MHz argon discharge. A parametric study involving variations in pressure, electrode spacing, and driving voltage is presented.