GaAs field emitter arrays
Abstract
The authors report on technological peculiarities of fabrication of large-area gallium arsenide multipoint cathodes. The topics discussed are fabrication methods, noise characteristics and uniformity of emission, and lifetime and degradation of semiconductor multipoint cathodes. The results of the emission characteristics investigation are described. Expressions for the noise power spectral density function and the time constant of degradation for such cathode arrays are obtained.
- Publication:
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IEEE Transactions on Electron Devices
- Pub Date:
- October 1991
- DOI:
- Bibcode:
- 1991ITED...38.2398B
- Keywords:
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- Emitters;
- Field Emission;
- Gallium Arsenides;
- Linear Arrays;
- Thermionic Cathodes;
- Volt-Ampere Characteristics;
- Electron Emission;
- Photolithography;
- Spectral Energy Distribution;
- Electronics and Electrical Engineering