Paramagnetic nitrogen in chemical vapor deposition diamond thin films
Abstract
Electron-paramagnetic-resonance (EPR) studies demonstrate the presence of nitrogen point defects in microwave-assisted chemical vapor deposition (CVD) diamond thin films. Polycrystalline powder pattern EPR spectra are interpreted with g=2.0023, A∥=114.0 MHz, and A⊥=81.3 MHz. These spin parameters are identical to those of nitrogen in single crystal natural diamonds. Quantitative EPR and secondary ion-mass spectrometry (SIMS) results of CVD diamond thin films suggest that nitrogen point defect formation is favored over aggregate nitrogen formation.
- Publication:
-
Applied Physics Letters
- Pub Date:
- October 1991
- DOI:
- Bibcode:
- 1991ApPhL..59.1870H
- Keywords:
-
- Diamond Films;
- Electron Paramagnetic Resonance;
- Nitrogen;
- Thin Films;
- Vapor Deposition;
- Crystal Growth;
- Electrical Properties;
- Mass Spectroscopy;
- Optical Properties;
- Solid-State Physics