Study of asymmetrical electric discharges using particle simulation
Abstract
Asymmetrical electric discharges are widely used in the microelectronics industry. The asymmetry in the electrode areas determines the magnitude of the plasma-to-electrode voltage (V sub a) at the powered electrode, which determines the ion bombarding energy. Two many-particle simulation codes, PDC1 and PDC2, were developed. These codes are electrostatic, one-dimensional (radial) and model a bounded plasma between two infinite cylinders or two concentric spheres that can be connected to an RLC external circuit. Both codes consider asymmetrical electrode areas. In order to simulate electrical discharges, Monte-Carlo simulation of electron-neutral and ion-neutral collisions were included. These codes were used to study the relationship between the voltage area ratio across the sheaths, V(sub a)/V(sub b), and the electrode area ratio A(sub b)/A(sub a). Simulation results agree with experimental results and also with the analytical model that includes local ionization near the electrodes which is observed to occur in almost all of the simulations.
- Publication:
-
Unknown
- Pub Date:
- November 1990
- Bibcode:
- 1990saed.reptQ....A
- Keywords:
-
- Applications Programs (Computers);
- Asymmetry;
- Electric Discharges;
- Ion Irradiation;
- Mathematical Models;
- Plasma Control;
- Plasma Cylinders;
- Plasma Electrodes;
- Computerized Simulation;
- Concentric Spheres;
- Electric Potential;
- Electrostatics;
- Ionization;
- Monte Carlo Method;
- Particle Collisions;
- Rlc Circuits;
- Sheaths;
- Electronics and Electrical Engineering