Improving the performance of InAs(1-x)Sb(x)/InSb infrared detectors grown by metal organic chemical vapor deposition
Abstract
Diethylselenium and tetraethyltin were investigated as n-type dopants for InSb. Carrier concentrations between 6 x 10(exp 15) and 4 x 10(exp 18)/cu cm with 77 K mobilities ranging from 75,000 to 10,000 sq cm/Vs were achieved for Sn doped InSb. Triethylantimony and trimethylindium were used to grow InSb over the temperature range of 410 to 470 C with a decrease in the p-type background occurring at 410 C. Diodes were prepared using tetraethyltin, trimethylindium and trimethylantimony at 470 C. The resulting current-voltage characteristics are improved over those of diodes grown previously using dimethyltellurium. SIMS measurements indicate a diffusion coefficient for Sn in InSb at 470 C that is approx. 1 x 10(exp -15) sq cm/s.
- Publication:
-
Presented at the 5th International Conference on Metalorganic Vapor Phase Epitaxy
- Pub Date:
- 1990
- Bibcode:
- 1990mvpe.conf...18B
- Keywords:
-
- Indium Antimonides;
- Indium Arsenides;
- Infrared Detectors;
- N-Type Semiconductors;
- P-Type Semiconductors;
- Photodiodes;
- Vapor Deposition;
- Crystal Growth;
- Fabrication;
- Superlattices;
- Solid-State Physics