Random logic oxide screening methods
Abstract
This report covers the work performed on the Random Logic Oxide Screening Methods study in which techniques were investigated to improve oxide reliability screening methods in CMOS random logic devices. This effort included modeling of time dependent dielectric breakdown in state-of-the-art gate oxides, development of both internal and external screening techniques, and the performance of a screen and accelerated life test to verify predicted screening effects.
- Publication:
-
Final Report
- Pub Date:
- December 1990
- Bibcode:
- 1990mms..rept.....K
- Keywords:
-
- Accelerated Life Tests;
- Cmos;
- Oxides;
- Reliability Engineering;
- Dielectric Properties;
- Quality Control;
- Technology Assessment;
- Time Dependence;
- Solid-State Physics