Intense high-repetition-rate excimer lasers and applications
Abstract
Building of high average output power excimer lasers requires the solution of several complex problems. The main challenge is the creation of a uniform discharge which can be easily reproduced even at high pulse repetition rates. Some approaches to solving this problem are discussed. They resulted in creation of lasers with aperture of 4 sq cm operating at 1 kHz producing the output of 420 W at 308 nm. A large-aperture XeCl laser can produce 10 J per pulse at 50 Hz.
- Publication:
-
High-Power Gas Lasers
- Pub Date:
- June 1990
- DOI:
- 10.1117/12.18483
- Bibcode:
- 1990SPIE.1225..164B
- Keywords:
-
- Excimer Lasers;
- High Power Lasers;
- Laser Applications;
- Pulse Repetition Rate;
- Pulsed Lasers;
- Glow Discharges;
- Laser Outputs;
- Lasing;
- Lasers and Masers