Development of a method for quantitative determination of photon emissions of x ray sources and their utilization in laser produced carbon and iron plasmas
Abstract
A measuring device of source calibration was developed and built for the spectral field of non penetrating X-ray radiation from 250 to 1800 eV in a radiometric laboratory. A method was obtained for the calibration of line and continuous radiation sources by comparison with synchrotron radiation BESSY, as a primary radiation standard. The measuring device is described, by which radiation of carbon and iron lasers are examined. The carbon plasma showed a spectrum with few lines of high intensity and a soft continuum radiation. The iron plasma delivered a multilined spectrum in a 720 to 100 eV photon energy field, which is, for example, of interest for X-ray lithography.
- Publication:
-
Ph.D. Thesis
- Pub Date:
- 1990
- Bibcode:
- 1990PhDT........20T
- Keywords:
-
- Photons;
- Radiation Measurement;
- Radiometers;
- Synchrotron Radiation;
- X Ray Sources;
- X Rays;
- Calibrating;
- Carbon Lasers;
- Emission Spectra;
- Laser Plasmas;
- Lithography;
- Polarization Characteristics;
- Plasma Physics