Real-time monitoring of molecular-beam epitaxy processes with coaxial impact-collision ion scattering spectroscopy (CAICISS)
Abstract
Coaxial impact-collision ion scattering spectroscopy (CAICISS) is a novel form of low-energy ion scattering spectroscopy (ISS), in which a pulsed-beam low-energy ion source and a time-of-flight ion energy analyzer are placed coaxially so as to cover the experimental scattering angle at 180°. It is demonstrated that CAICISS is useful for monitoring molecular-beam epitaxy (MBE) processes in real time by taking the MBE growth of AlAs on a GaAs(001) substrate as an example.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- January 1990
- DOI:
- 10.1016/0168-583X(90)90862-O
- Bibcode:
- 1990NIMPB..45..408K