Preparation of Nearly Stoichiometric Superconducting Y-Ba-Cu-O Films by an MOCVD Technique Using Ozone
Abstract
Superconducting Y-Ba-Cu-O films of nearly stoichiometric composition (Y:Ba:Cu=1:2:3.6) were prepared by an MOCVD technique on MgO(100) substrates at 650°C without postannealing. By introducing ozone into the reactor, we obtained a film with higher zero resistive temperature (75 K) and better surface morphology and c-axis orientation, compared to a film of the same composition prepared without ozone.
- Publication:
-
Japanese Journal of Applied Physics
- Pub Date:
- November 1990
- DOI:
- 10.1143/JJAP.29.L2041
- Bibcode:
- 1990JaJAP..29L2041O
- Keywords:
-
- High Temperature Superconductors;
- Ozone;
- Stoichiometry;
- Superconducting Films;
- Vapor Deposition;
- Yttrium Oxides;
- Barium Oxides;
- Copper Oxides;
- Photomicrographs;
- Thin Films;
- X Ray Analysis;
- Solid-State Physics