The first x-ray lithography beamline at Hefei National Synchrotron Radiation Laboratory
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 1990
- DOI:
- 10.1116/1.585109
- Bibcode:
- 1990JVSTB...8.1524Q