Resolution of a computerized phase microscope

The general design and performance characteristics of a computerized phase microscope based on the Linnik interferometer with a resolution of about 0.3 lambda are described, and the problem of the spatial resolution of low-contrast objects is discussed. It is expected that certain improvements to the computerized phase microscope and a reduction in the wavelength will make it possible to obtain a resolution of less than 0.1 micron, which is comparable to the resolution of scanning electron microscopes.