Implantation-induced texture
Abstract
High-fluence nitrogen ion implantation into titanium at room temperature results in the formation of titanium nitride precipitation. Electron diffraction measurements reveal an implantation-induced texture of titanium nitride precipitations. Electron diffraction diagrams were taken while tilting the implanted samples and incomplete pole figures were determined. The measured pole figures show a fibre texture. The reproduction of the orientation distribution function based on a tomographic algorithm. The experiments demonstrate a strong coupling effect of implantation-induced texture on direction of implantation. The most intensive texture component, the (111) plane, is always perpendicular to the direction of implantation. Results of this investigation support the assumption that the effect of implantation-induced texture is caused by the process of seed selection through ion channeling.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- June 1989
- DOI:
- 10.1016/0168-583X(89)90709-X
- Bibcode:
- 1989NIMPB..42..216R