XANES and Raman Spectroscopic Studies of Diamond Films Synthesized by Hot Filament CVD
Abstract
Diamond films synthesized by hot filament CVD were studied by SEM, X-ray diffraction, and Raman and XANES spectroscopies. All of these methods have confirmed that the films prepared at low methane concentrations (1.0 vol.% and 4.0 vol.% in H2) consist of diamond crystals. In contrast to these, the deposit at a high methane concentration (7.5 vol.%) does not provide an X-ray diffraction pattern or a Raman signal characteristic of diamond, indicating the absence of diamond crystals with long-range order. Nevertheless, the XANES spectrum revealed that this specimen is composed of small diamond clusters.
- Publication:
-
Japanese Journal of Applied Physics
- Pub Date:
- July 1989
- DOI:
- 10.1143/JJAP.28.L1282
- Bibcode:
- 1989JaJAP..28L1282T
- Keywords:
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- Diamond Films;
- Diamonds;
- Polycrystals;
- Raman Spectroscopy;
- Thin Films;
- Vapor Deposition;
- Electron Microscopy;
- Methane;
- Microstructure;
- X Ray Diffraction;
- Solid-State Physics