A simple self-aligned Si bipolar transistor for high-speed integrated circuits
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- June 1989
- DOI:
- 10.1109/16.24370
- Bibcode:
- 1989ITED...36.1212S
- Keywords:
-
- Bipolar Transistors;
- Frequency Response;
- Self Alignment;
- Silicon Transistors;
- Vhsic (Circuits);
- Fabrication;
- Logic Circuits;
- Metal Films;
- Simulation;
- Electronics and Electrical Engineering