Boron doping of diamond thin films
Abstract
The electrical conductivity of diamond thin films produced by the hot-filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well-defined bulk conductivity measurements with quantitative secondary-ion mass spectrometry and Raman spectroscopy shows that the conductivity increase is associated with atomic boron doping and rules out any significant role for a graphitic-type component.
- Publication:
-
Applied Physics Letters
- Pub Date:
- September 1989
- DOI:
- 10.1063/1.101676
- Bibcode:
- 1989ApPhL..55.1121M
- Keywords:
-
- Boron;
- Diamond Films;
- Diamonds;
- Doped Crystals;
- Thin Films;
- Diatomic Molecules;
- Electrical Resistivity;
- Mass Spectroscopy;
- Raman Spectra;
- Solid-State Physics