Non-propulsive application of the RF-ion thruster for material processing with reactive gases
Abstract
A RIT-type RF-ion generator RIM 10 designed for material processing is described, and test results are presented. Performance mapping shows ion-beam currents up to 300 mA at 1 W/mA specific power consumption, and 0.03 sccm gas flow rate per 1 mA. Due to the fact that the RIM 10 uses an electrodeless conductively coupled RF discharge (and, thus, no filament), it is well suited for reactive gases such as oxygen or fluorinated and chlorinated hydrocarbons.
- Publication:
-
20th International Electric Propulsion Conference
- Pub Date:
- 1988
- Bibcode:
- 1988iep..conf..665F
- Keywords:
-
- Ion Beams;
- Ion Engines;
- Protective Coatings;
- Rit Engines;
- Thrustors;
- Gas Flow;
- Ion Sources;
- Thin Films;
- Vapor Deposition;
- Plasma Physics