SAW screening effect in a layered structure consisting of a ZnO piezoelectric film on silicon
Abstract
Results are reported on the influence of the screening of the SAW electric component in silicon on the electromechanical coupling coefficient (EMCC) of a ZnO/Si structure. Experimental results are presented on the dependence of the EMCC on the ratio of film thickness to SAW length. The design of a SAW filter using the results presented is discussed.
- Publication:
-
Radiotekhnika i Elektronika
- Pub Date:
- October 1988
- Bibcode:
- 1988RaEl...33.2197B
- Keywords:
-
- Piezoelectric Ceramics;
- Sandwich Structures;
- Screen Effect;
- Silicon;
- Surface Acoustic Wave Devices;
- Film Thickness;
- Zinc Oxides;
- Electronics and Electrical Engineering