Analysis of grain growth due to ion irradiation of thin films
Abstract
It has been reported recently that ion irradiation of thin films can lead to grain growth. In this paper, an analysis of grain growth in ion-irradiated thin films is discussed. It is based on establishing an analogy with thermally-activated grain growth. Recently reported experimental results are used to test the validity of the analysis.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- January 1988
- DOI:
- 10.1016/0168-583X(88)90472-7
- Bibcode:
- 1988NIMPB..29..650I